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Intek Song, Chibeom Park, Misun Hong, Jaeyoon Baik, Hyun-Joon Shin and Hee Cheul Choi Patternable Large-Scale Molybdenium Disulfide Atomic Layers Grown by Gold-Assisted Chemical Vapor Deposition Angewandte Chemie International Edition 53

Version of Record online: 13 JAN 2014 | DOI: 10.1002/anie.201309474

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When a gold surface reacts with vaporized [Mo(CO)6] at 300 °C, a surface alloy forms, which in turn becomes an ideal large-scale atom-thick Mo reservoir. When this alloy further reacts with H2S, atomic layers of MoS2 are specifically formed on Au, which can be isolated by means of etching.

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