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Kate Black, Anthony C. Jones, John Bacsa, Paul R. Chalker, Paul A. Marshall, Hywel O. Davies, Peter N. Heys, Paul O'Brien, Mohammad Afzaal, James Raftery and Gary W. Critchlow Investigation of New 2,5-Dimethylpyrrolyl Titanium Alkylamide and Alkoxide Complexes as Precursors for the Liquid Injection MOCVD of TiO2 Chemical Vapor Deposition 16

Version of Record online: 22 MAR 2010 | DOI: 10.1002/cvde.200906818

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The new Ti-2,5-dimethylpyrrolyl complexes [(Me2C4H2N)Ti(NMe2)3] (see Fig. below) and [(Me2C4H2N)Ti(µ2-OiPr)(OiPr)2]2 have been synthesised and structurally characterised. They have been investigated as precursors for the deposition of TiO2 by liquid injection MOCVD over a wide range of substrate temperatures.

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