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Gozde Ozaydin-Ince and Karen K. Gleason Tunable Conformality of Polymer Coatings on High Aspect Ratio Features Chemical Vapor Deposition 16

Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906821

Conformal polymer thin-film coatings of high aspect ratio trenches can be achieved by tuning the process parameters of initiated CVD. Effects of deposition parameters on conformality are studied at various aspect ratios using a ballistic model. The results of these studies enabled the fabrication of template-based polymer nanotubes of high aspect ratios.

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