E-mail

E-mail a Wiley Online Library Link

Gozde Ozaydin-Ince and Karen K. Gleason Tunable Conformality of Polymer Coatings on High Aspect Ratio Features Chemical Vapor Deposition 16

Article first published online: 4 MAR 2010 | DOI: 10.1002/cvde.200906821

Conformal polymer thin-film coatings of high aspect ratio trenches can be achieved by tuning the process parameters of initiated CVD. Effects of deposition parameters on conformality are studied at various aspect ratios using a ballistic model. The results of these studies enabled the fabrication of template-based polymer nanotubes of high aspect ratios.

Complete the form below and we will send an e-mail message containing a link to the selected article on your behalf

Required = Required Field

SEARCH