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Chin Sheng Chua, Xiaoqin Fang, Xiaofeng Chen, Ooi Kiang Tan, Man Siu Tse, Andrew McIntosh Soutar and Xingzhao Ding Effect of Annealing Temperature on Microstructure and UV Light Photocatalytic Activity of TiO2 Films Grown by Atmospheric Pressure CVD Chemical Vapor Deposition 20

Version of Record online: 6 NOV 2013 | DOI: 10.1002/cvde.201207015

The effect of annealing on the photocatalytic properties of TiO2 thin films produced using atmospheric pressure CVD is investigated. Photocatalytic degradation of stearic acid shows a decrease caused by two mechanisms: an increase in defects states (O- and Ti vacancies) resulting in recombination of electrons and holes, and formation of large rutile grains with limited heterojunction semiconductor effects with anatase film.

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