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Zaira Lipani, Maria R. Catalano, Patrizia Rossi, Paola Paoli and Graziella Malandrino A Novel Manganese(II) MOCVD Precursor: Synthesis, Characterization, and Mass Transport Properties of Mn(hfa)2•tmeda Chemical Vapor Deposition 19

Version of Record online: 18 FEB 2013 | DOI: 10.1002/cvde.201207017

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A non-hygroscopic, thermally stable, and volatile MnII complex is synthesized through coordination of the Lewis base tmeda to the Mn(hfa)2 moiety. Mn(hfa)2•tmeda represents the first example of a manganese(II) precursor that can be used in the liquid phase without decomposition, thus providing constant evaporation rates even for long deposition times. Its application to MOCVD produces hausmannite Mn3O4 phase films with a highly structured surface.

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