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Rinat R. Ismagilov, Petr V. Shvets, Aleksey A. Zolotukhin and Alexander N. Obraztsov Growth of a Carbon Nanotube Forest on Silicon using Remote Plasma CVD Chemical Vapor Deposition 19

Article first published online: 30 OCT 2013 | DOI: 10.1002/cvde.201207031

A forest of aligned multiwalled carbon nanotubes is obtained, without a metal catalyst, by carbon deposition on a Si substrate from a methane/hydrogen gas mixture activated by DC discharge. A proposed model explains the metal-free nanotube synthesis by condensation of carbon on the inner part of the pores formed due to etching of the Si substrate in hydrogen plasma.

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