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Yujie Sun, Richard P. Padbury, Halil I. Akyildiz, Matthew P. Goertz, Jeremy A. Palmer and Jesse S. Jur Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers Chemical Vapor Deposition 19

Version of Record online: 16 MAY 2013 | DOI: 10.1002/cvde.201207042

The mechanical properties of Al2O3 ALD coatings on polyamide 6 are examined by nano-indentation and flexure testing to determine the influence of a sub-surface hybrid layer formed during the ALD process. The results show the importance of the consideration of this hybrid layer on the use of these materials in future flexible electronic and encapsulation applications.

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