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Aravind Suresh, Daniel Anastasio and Daniel D. Burkey Potential of Hexyl Acrylate Monomer as an Initiator in Photo-initiated CVD Chemical Vapor Deposition 20

Version of Record online: 20 NOV 2013 | DOI: 10.1002/cvde.201304322

The potential of hexyl acrylate as an initiator in photo-initiated (pi) CVD is explored by demonstrating its auto-polymerization under ultraviolet (UV) radiation of wavelength 254 nm. Deposition of poly(hexyl acrylate) films on silicon substrates proceeds at high rates, approaching 1.7 µm min−1, at a stage temperature of 12.1°C, and the process is observed to be adsorption controlled.

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