Jay J. Senkevich tert-Butylethynyl-parylene and Phenylethynyl-parylene Chemical Vapor Deposition 20
Two cross-linkable parylene polymers, tert-butylethynyl and phenylethynyl, are deposited via the well-known Gorham method, from a unique scalable synthesis route to their respective cyclophane precursors. They are both stable in vacuum to 350°C, however the tert-butylethynyl variant has a much lower index of refraction of 1.5894 and is optically isotropic compared to phenylethynyl, which is highly negatively birefringent and has a much higher index of refraction (1.6482). Both have the potential to be solvent-soluble, much like parylene E.
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