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Devika Choudhury and Shaibal K. Sarkar The ALD-MLD Growth of a ZnO-Zincone Heterostructure Chemical Vapor Deposition 20

Version of Record online: 24 FEB 2014 | DOI: 10.1002/cvde.201307092

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A combination of atomic layer deposition and molecular layer deposition is used for the growth of a mixed inorganic/organic multilayer film of zinc oxide and zincone. Full characterization of the deposited multilayer film is presented, and various tunable properties of the material are studied. The formation of ZnO nanosheets on selective etching of the organic layer is achieved.

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