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Carolin Schilling and Markus Winterer Preserving Particle Characteristics at Increasing Production Rate of ZnO Nanoparticles by Chemical Vapor Synthesis Chemical Vapor Deposition 20

Version of Record online: 24 FEB 2014 | DOI: 10.1002/cvde.201307094

ZnO nanoparticles are synthesized by chemical vapor synthesis (CVS) via different possible routes to increase the production rate, namely by increasing the total pressure, the precursor concentration, the reactor diameter, and alternatively by parallelization through the use of parallel reactors. The influence on the particle characteristics are investigated. It is found that only the use of parallel tubes allows the increase of the production rate while preserving particle characteristics.

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