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Per-Anders Hansen, Helmer Fjellvåg, Terje G. Finstad and Ola Nilsen Luminescent Properties of Multilayered Eu2O3 and TiO2 Grown by Atomic Layer Deposition** Chemical Vapor Deposition 20

Article first published online: 25 JUL 2014 | DOI: 10.1002/cvde.201407113

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The luminescence properties of amorphous europium titanium oxide thin films grown by atomic layer deposition are investigated as a function of Eu2O3 and TiO2 layer thicknesses, varying from a homogeneous mixture to 2.9 nm repeating layer structures. Samples ranging from homogeneous to 0.8 nm repeating layers are optically similar while the luminescence intensity decreases for thicker layers.

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