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María de la Paz Miguel and J. Pablo Tomba Determination of one-dimensional spherically aberrated point spread function in depth profiling by confocal Raman microscopy Journal of Raman Spectroscopy 44

Version of Record online: 16 JAN 2013 | DOI: 10.1002/jrs.4195

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We present a simple experiment that allows full characterization of the point spread function (PSF) in refraction-aberrated depth profiling experiments with confocal Raman microscopy. We used a wedge-shaped solid polymer film to induce refraction aberrations on the response of an infinitesimally thin Raman scatterer (a silicon wafer). Via depth slicing of the specimen, we were able to directly characterize the shape of refraction-aberrated PSF as a function of the nominal focusing depth.

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