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Dharshana N. Wijesundera, Indrajith Rajapaksa, Xeumei Wang, Jia-Rui Liu, Irene Rusakova and Wei-Kan Chu Ion beam engineered nano silver silicon substrates for surface enhanced Raman spectroscopy Journal of Raman Spectroscopy 44

Version of Record online: 1 JUN 2013 | DOI: 10.1002/jrs.4326

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We demonstrate a method for engineering effective SERS substrates by high dose, high current density Ag ion implantation in silicon followed by a wet etch process. The implanted Ag concentration exceeds the solid solubility in Si and the high current density promotes nucleation and formation of Ag nano particles embedded in Si, which acts as an effective SERS substrate. Preliminary results show SERS enhancement of 2E5 and fabrication parameters may be optimized for improved performance.

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