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Ting-Gang Chen, Peichen Yu, Shih-Wei Chen, Feng-Yu Chang, Bo-Yu Huang, Yu-Chih Cheng, Jui-Chung Hsiao, Chi-Kang Li and Yuh-Renn Wu Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics Progress in Photovoltaics: Research and Applications 22

Version of Record online: 1 OCT 2012 | DOI: 10.1002/pip.2291

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This paper presents the optical and photovoltaic characteristics of silicon nanohole arrays fabricated using polystyrene nanosphere lithography and reactive-ion etching techniques for large-area processes. A damage removal etching is subsequently introduced to mitigate the surface recombination issues and also suppress the surface reflection due to modifications in the nanohole sidewall profile, resulting in a 19% increase in the power conversion efficiency. Silicon nanohole arrays reveal great potential for efficient light harvesting in thin-silicon photovoltaics.

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