Takuya Matsui, Hitoshi Sai, Kimihiko Saito and Michio Kondo High-efficiency thin-film silicon solar cells with improved light-soaking stability Progress in Photovoltaics: Research and Applications 21
Hydrogenated amorphous silicon (a-Si : H) films are grown by plasma-enhanced chemical vapor deposition with a triode electrode configuration in which a SiH4 H2 glow-discharge plasma is confined spatially away from the substrate. By this method, the light-induced degradation of solar cell efficiency is reduced substantially. The stabilized efficiencies of 9.6% and 11.9% are obtained for a-Si : H single-junction and micromorph tandem solar cells, respectively.
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