Christopher G. Hardy and Chuanbing Tang Advances in square arrays through self-assembly and directed self-assembly of block copolymers Journal of Polymer Science Part B: Polymer Physics 51
Nanometer-scaled square arrays of block copolymers are of particular interest to the electronics industry because they are more compatible with semiconductor integrated circuit design standards based on a rectilinear system. However, they are more difficult to achieve due to the unique demands the geometry places on polymer compositions and chemistry. Here, recent advances in the development of square arrays of block copolymers by self-assembly and directed self-assembly are reviewed. Applications in nanolithography and future directions are discussed.
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