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J. M. Ngaruiya, S. Venkataraj, R. Drese, O. Kappertz, T. P. Leervad Pedersen and M. Wuttig Preparation and characterization of tantalum oxide films produced by reactive DC magnetron sputtering physica status solidi (a) 198

Version of Record online: 19 MAY 2003 | DOI: 10.1002/pssa.200306444

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