Seungjun Lee, Seokhwan Bang, Joohyun Park, Soyeon Park, Wooho Jeong and Hyeongtag Jeon The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition physica status solidi (a) 207
Article first published online: 7 JUN 2010 | DOI: 10.1002/pssa.200925514
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