E-mail a Wiley Online Library Link

Mustafa Alevli, Cagla Ozgit, Inci Donmez and Necmi Biyikli Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures physica status solidi (a) 209

Version of Record online: 24 NOV 2011 | DOI: 10.1002/pssa.201127430

Complete the form below and we will send an e-mail message containing a link to the selected article on your behalf

Required = Required Field