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J. Frascaroli, G. Seguini, E. Cianci, D. Saynova, J. van Roosmalen and M. Perego Surface passivation for ultrathin Al2O3 layers grown at low temperature by thermal atomic layer deposition physica status solidi (a) 210

Article first published online: 28 NOV 2012 | DOI: 10.1002/pssa.201200568

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