M. Van Gompel, B. Conings, K. L. Jiménez Monroy, J. D‘Haen, K. Gilissen, M. D‘Olieslaeger, M. K. Van Bael and P. Wagner Preparation of epitaxial films of the transparent conductive oxide Al:ZnO by reactive high-pressure sputtering in Ar/O2 mixtures physica status solidi (a) 210
Article first published online: 5 MAR 2013 | DOI: 10.1002/pssa.201200986
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