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Junjun Huang, Yuheng Zeng, Weiyan Wang, Ye Yang, Jinhua Huang, Ruiqin Tan, Shixun Dai, Ning Dai and Weijie Song Reduction of residual stress in SiO2-matrix silicon nano-crystal thin films by a combination of rapid thermal annealing and tube-furnace annealing physica status solidi (a) 210

Article first published online: 10 DEC 2012 | DOI: 10.1002/pssa.201228476

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