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Ronny Kirste, Markus R. Wagner, Christian Nenstiel, Frank Brunner, Markus Weyers and Axel Hoffmann Effect of TMGa preflow on the properties of high temperature AlN layers grown on sapphire physica status solidi (a) 210

Version of Record online: 25 OCT 2012 | DOI: 10.1002/pssa.201228506

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