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Chih-Feng Yen, Jung-Chan Lee, Chi-Hsuan Cheng and Ming-Kwei Lee Electrical characterization of liquid-phase-deposited SiON on (NH4)2S-treated GaAs physica status solidi (a) 210

Version of Record online: 13 MAY 2013 | DOI: 10.1002/pssa.201228592

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