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Jaesang Lee, Seung Jae Lee, Won Bae Han, Heeyoung Jeon, Jingyu Park, Woochool Jang, Chong Seung Yoon and Hyeongtag Jeon Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition physica status solidi (a) 210

Article first published online: 25 OCT 2012 | DOI: 10.1002/pssa.201228671

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