Masoud Dahmardeh, Mohamed Sultan Mohamed Ali, Tanveer Saleh, Tee Min Hian, Mehran Vahdani Moghaddam, Alireza Nojeh and Kenichi Takahata High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator physica status solidi (a) 210
A high-power micro-electro-mechanical switch is realized using a forest of vertically aligned carbon nanotubes (CNT) as contact material and a shape-memory-alloy (SMA) actuator. Large-force actuation of SMA enables vastly distributed contacts between the forest and the copper electrode, achieving low contact resistance and high current conduction. The contact material also shows varistor-like behavior. Long-term switching for over one-million cycles is demonstrated.
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