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Chee-Hong An, Chandreswar Mahata, Young-Chul Byun, Myung Soo Lee, Yu Seon Kang, Mann-Ho Cho and Hyoungsub Kim Electrical characteristics of HfO2 films on InP with different atomic-layer-deposition temperatures physica status solidi (a) 210

Version of Record online: 20 MAR 2013 | DOI: 10.1002/pssa.201228759

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