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Benjamin Colombeau, Baonian Guo, Hans-Joachim Gossmann, Fareen Khaja, Nilay Pradhan, Andrew Waite, K. V. Rao, Christos Thomidis, Kyu-Ha Shim, Todd Henry and Naushad Variam Advanced CMOS devices: Challenges and implant solutions physica status solidi (a) 211

Article first published online: 13 DEC 2013 | DOI: 10.1002/pssa.201300169

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