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E. Napolitani, E. Bruno, G. Bisognin, M. Mastromatteo, D. De Salvador, G. G. Scapellato, S. Boninelli, F. Priolo, V. Privitera and A. Carnera Role of ion mass on damage accumulation during ion implantation in Ge physica status solidi (a) 211

Version of Record online: 29 NOV 2013 | DOI: 10.1002/pssa.201300324

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