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Haiyang Dai, Zhenping Chen, Renzhong Xue, Tao Li and Yuncai Xue Effect of step biasing on diamond-like carbon films deposited by pulsed unbalanced magnetron sputtering physica status solidi (a) 210

Version of Record online: 14 JUN 2013 | DOI: 10.1002/pssa.201329110

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