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Irina Kärkkänen, Andrey Shkabko, Mikko Heikkilä, Jaakko Niinistö, Mikko Ritala, Markku Leskelä, Susanne Hoffmann-Eifert and Rainer Waser Study of atomic layer deposited ZrO2 and ZrO2/TiO2 films for resistive switching application physica status solidi (a) 211

Article first published online: 16 SEP 2013 | DOI: 10.1002/pssa.201330034

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