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Nhung T. P. Nguyen, Yannick Coffinier, Vincent Thomy and Rabah Boukherroub Fabrication of silicon nanostructures using metal-assisted etching in NaBF4 physica status solidi (a) 210

Version of Record online: 22 JUL 2013 | DOI: 10.1002/pssa.201330035

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