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Ingmar Höger, Thomas Schmidt, Anja Landgraf, Martin Schade, Annett Gawlik, Gudrun Andrä, Hartmut S. Leipner and Fritz Falk In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films physica status solidi (a) 210

Version of Record online: 20 OCT 2013 | DOI: 10.1002/pssa.201330056

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