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Nagendra B. Srinivasan, Tobias B. Thiede, Teresa de los Arcos, Detlef Rogalla, Hans-Werner Becker, Anjana Devi and Roland A. Fischer MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics physica status solidi (a) 211

Article first published online: 13 NOV 2013 | DOI: 10.1002/pssa.201330127

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