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Jozef Huran, Pavol Boháček, Valery N. Shvetsov, Alexander P. Kobzev, Angela Kleinová, Sergey B. Borzakov, Ladislav Hrubčín, Mária Sekáčová and Nikolay I. Balalykin Neutron-irradiation effect on the electrical characteristics of amorphous silicon carbide and nitrogen-doped silicon carbide films prepared by PECVD technology physica status solidi (a) 210

Version of Record online: 21 OCT 2013 | DOI: 10.1002/pssa.201330248

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