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M. Botzakaki, A. Kerasidou, N. Xanthopoulos, D. Skarlatos, S. Kennou, S. Ladas, S. N. Georga and C. A. Krontiras Electrical characteristics of ALD-deposited Al2O3 thin films on p-type germanium substrates physica status solidi (c) 10

Version of Record online: 29 NOV 2012 | DOI: 10.1002/pssc.201200400

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