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Fabian Koehler, Dina H. Triyoso, Itasham Hussain, Bianca Antonioli and Klaus Hempel Challenges in spacer process development for leading-edge high-k metal gate technology physica status solidi (c) 11

Article first published online: 25 NOV 2013 | DOI: 10.1002/pssc.201300157

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