E-mail a Wiley Online Library Link

Antonino La Magna, Giuseppe Fisicaro, Giuseppe Nicotra, Yohann Spiegel and Frank Torregrosa Atomic scale Monte Carlo simulations of BF3 plasma immersion ion implantation in Si physica status solidi (c) 11

Version of Record online: 9 DEC 2013 | DOI: 10.1002/pssc.201300289

Complete the form below and we will send an e-mail message containing a link to the selected article on your behalf

Required = Required Field