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Gloria Tabacchi, Ettore Fois, Davide Barreca and Alberto Gasparotto Opening the Pandora's jar of molecule-to-material conversion in chemical vapor deposition: Insights from theory International Journal of Quantum Chemistry 114

Version of Record online: 2 JUL 2013 | DOI: 10.1002/qua.24505

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Molecule-to-material conversion by chemical vapor deposition (CVD) takes place under highly reactive conditions and involves a complex and still-unexplored chemistry. A proper theoretical description would require high accuracy, large models, and temperature effects. This perspective surveys some of the main issues in modeling CVD processes and suggests strategies for future progress in the field.

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