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Nora Graf, Eda Yeğen, Andreas Lippitz, Dieter Treu, Thomas Wirth and Wolfgang E. S. Unger Optimization of cleaning and amino- silanization protocols for Si wafers to be used as platforms for biochip microarrays by surface analysis (XPS, ToF-SIMS and NEXAFS spectroscopy) Surface and Interface Analysis 40

Article first published online: 9 JAN 2008 | DOI: 10.1002/sia.2621

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