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Yumi Yang, Youngkyu Hwang, Hyun A Cho, Jung-Hoon Song, Seong-Ju Park, John A. Rogers and Heung Cho Ko Arrays of Silicon Micro/Nanostructures Formed in Suspended Configurations for Deterministic Assembly Using Flat and Roller-Type Stamps Small 7

Version of Record online: 17 DEC 2010 | DOI: 10.1002/smll.201001633

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The ability to create and manipulate large arrays of inorganic semiconductor micro/nanostructures for integration on unconventional substrates provides new possibilities in device engineering. Here, simple methods are described for the preparation of structures of single crystalline silicon in suspended and tethered configurations that facilitate their deterministic assembly using transfer-printing techniques.

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