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Huigao Duan, Joel K. W. Yang and Karl K. Berggren Controlled Collapse of High-Aspect-Ratio Nanostructures Small 7

Version of Record online: 2 AUG 2011 | DOI: 10.1002/smll.201100892

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Random collapse is a common phenomenon in high-aspect-ratio (HAR) nanostructures. Methods to control such collapse by using capillary force during the evaporation–drying process are proposed. Controlled collapse is realized by introducing a slightly asymmetric cross section, curvature, and tilt to the nanostructures. With this technique, sub- 10-nm-gap arrays are fabricated from HAR structures.

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