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Woon Ik Park, Kyungho Kim, Hyun-Ik Jang, Jae Won Jeong, Jong Min Kim, Jaesuk Choi, Jae Hong Park and Yeon Sik Jung Directed Self-Assembly with Sub-100 Degrees Celsius Processing Temperature, Sub-10 Nanometer Resolution, and Sub-1 Minute Assembly Time Small 8

Version of Record online: 12 SEP 2012 | DOI: 10.1002/smll.201201407

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The synergetic combination of low-temperature thermal assistance with solvent annealing for the self-assembly of block copolymers with a large Flory-Huggins interaction parameter simultaneously achieves sub-10 nm resolution and sub-1 minute annealing time. It is shown that this method is applicable to different geometries of patterns such as nanoscale dots, lines, and holes.

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