E-mail

E-mail a Wiley Online Library Link

Erwin J. W. Berenschot, Narges Burouni, Bart Schurink, Joost W. van Honschoten, Remco G. P. Sanders, Roman Truckenmuller, Henri V. Jansen, Miko C. Elwenspoek, Aart A. van Apeldoorn and Niels R. Tas 3D Nanofabrication of Fluidic Components by Corner Lithography Small 8

Article first published online: 21 AUG 2012 | DOI: 10.1002/smll.201201446

Thumbnail image of graphical abstract

A new technique for 3D nanofabrication is introduced and its application to the manufacturing of functional fluidic components is shown. One of the components is a 3D cell trapping device shown in the figure. The array of silicon nitride nanowire frames is created by conformal deposition and subsequent isotropic etching of silicon nitride in a mold containing sharp concave corners. This procedure is named corner lithography.

Complete the form below and we will send an e-mail message containing a link to the selected article on your behalf

Required = Required Field

Choose captcha format: Image or Audio. Click here if you need help.

SEARCH