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Erwin J. W. Berenschot, Narges Burouni, Bart Schurink, Joost W. van Honschoten, Remco G. P. Sanders, Roman Truckenmuller, Henri V. Jansen, Miko C. Elwenspoek, Aart A. van Apeldoorn and Niels R. Tas 3D Nanofabrication of Fluidic Components by Corner Lithography Small 8

Version of Record online: 21 AUG 2012 | DOI: 10.1002/smll.201201446

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A new technique for 3D nanofabrication is introduced and its application to the manufacturing of functional fluidic components is shown. One of the components is a 3D cell trapping device shown in the figure. The array of silicon nitride nanowire frames is created by conformal deposition and subsequent isotropic etching of silicon nitride in a mold containing sharp concave corners. This procedure is named corner lithography.

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