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Won-Gyu Bae, Jae Hoon Choi and Kahp Y. Suh Pitch-Tunable Size Reduction Patterning with a Temperature-Memory Polymer Small 9

Version of Record online: 21 SEP 2012 | DOI: 10.1002/smll.201201554

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A scalable and pitch-tunable size reduction patterning method is introduced by exploiting the temperature memory effect of shape memory polymer and replica molding of UV-curable materials.

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