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Yusuke Matsuda, Ill Ryu, Sean W. King, Jeff Bielefeld and Reinhold H. Dauskardt Toughening Thin-Film Structures with Ceramic-Like Amorphous Silicon Carbide Films Small 10

Version of Record online: 25 JUL 2013 | DOI: 10.1002/smll.201300130

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A significant improvement of adhesion in thin-film structures is demonstrated using embedded ceramic-like amorphous silicon carbide films (a-SiC:H films). a-SiC:H films exhibit plasticity at the nanoscale and outstanding chemical and thermal stability unlike most materials. The multi-functionality and the ease of processing of the films have potential to offer a new toughening strategy for reliability of nanoscale device structures.

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