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Amir Tavakkoli K. G., Samuel M. Nicaise, Adam F. Hannon, Kevin W. Gotrik, Alfredo Alexander-Katz, Caroline A. Ross and Karl K. Berggren Self-Assembly: Sacrificial-Post Templating Method for Block Copolymer Self-Assembly (Small 3/2014) Small 10

Version of Record online: 4 FEB 2014 | DOI: 10.1002/smll.201470017

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Block copolymer (BCP) thin films self-assemble to form nanoscale patterns, as K. K. Berggren and co-workers report on page 493. On a smooth substrate, the polystyrene-block-poly(dimethylsiloxane) copolymer forms randomly oriented inplane cylinders with a 35-nm period (images on the left). A set of sacrifical nanoposts made of poly(methyl methacrylate) directed the self-assembly to form (center top to bottom): square arrays of spheres or holes, and square and hexagonal meshes with bimodal hole-size distributions. The posts and the polystyrene are removed by etching and the final pattern consists of oxidized poly(dimethylsiloxane)

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