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Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano and Osamu Tabata Design and fabrication of a differential capacitive three-axis SOI accelerometer using vertical comb electrodes IEEJ Transactions on Electrical and Electronic Engineering 4

Version of Record online: 22 APR 2009 | DOI: 10.1002/tee.20416

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